---
schema_version: "secwatch.filing_event.v1"
accession: "0001104659-22-012797"
form_type: "8-K"
ticker: "ACLS"
cik: "0001113232"
company_name: "AXCELIS TECHNOLOGIES INC"
filed_at: "2022-02-07T23:59:59+00:00"
generated_at: "2026-06-27T10:30:12.780901+00:00"
event_type: "earnings"
sentiment: "positive"
materiality_score: 0.8
calibrated_materiality_score: 0.8
confidence: "high"
source: SEC EDGAR
---

# Axcelis reports record FY2021 revenue of $662.4M, EPS $2.88, well above guidance

## Summary
- Full year revenue $662.4M (+40% YoY), operating profit $127.3M (+119% YoY), both records.
- Q4 revenue $205.7M (above guidance), EPS $1.05 (above $0.92 guidance).
- Surpassed $650M revenue model two years ahead of plan; targeting $850M run rate in 2022.
- Cash, cash equivalents & restricted cash $295.7M, a record, after $12.5M in buybacks.
- Q1 2022 guidance: revenue ~$193M, gross margin ~43%, EPS ~$0.92.

## SEC filing metadata
- accession: 0001104659-22-012797
- form_type: 8-K
- ticker: ACLS
- cik: 0001113232
- company_name: AXCELIS TECHNOLOGIES INC
- filed_at: 2022-02-07T23:59:59+00:00
- event_type: earnings
- sentiment: positive
- materiality_score: 0.8
- calibrated_materiality_score: 0.8
- confidence: high
- sec_items: 2.02, 9.01
- EDGAR index: https://www.sec.gov/Archives/edgar/data/1113232/000110465922012797/0001104659-22-012797-index.htm
- EDGAR primary document: https://www.sec.gov/Archives/edgar/data/1113232/000110465922012797/tm225610d1_8k.htm

## Machine-readable alternates
- HTML: https://secwatch.observer/filing/0001104659-22-012797
- JSON: https://secwatch.observer/filing/0001104659-22-012797.json
- Plain text: https://secwatch.observer/filing/0001104659-22-012797.txt

This AI-assisted summary is a reading aid. Review the linked SEC EDGAR filing before relying on any specific claim.