Onto Innovation adopts Nonqualified Deferred Compensation Plan effective Jan 1, 2026

ONTO INNOVATION INC.

Plan allows eligible executives to defer up to 75% of salary and 100% of bonus, PSUs, and RSUs.
Non-employee directors may defer up to 100% of annual retainer, meeting fees, and RSUs.
Company may make discretionary contributions that vest immediately; all participant contributions fully vested.
Distributions available as lump sum or installments (2-10 years) upon separation, death, or disability.
Plan effective January 1, 2026; intended to comply with IRC Section 409A.

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