Onto Innovation to acquire 27% stake in Rigaku for $710M; strategic partnership deepened

ONTO INNOVATION INC.

Purchase price ~$710M for 61.1M shares (27% of Rigaku) from Carlyle affiliate; expected close H2 2026.
Acquisition to accelerate joint X-ray/OCD process control solutions; already selected by two key customers.
Investment expected to be accretive as of Dec 31, 2026; Onto gets one board seat.
$500M bridge loan commitment from Goldman Sachs to help finance the deal and related expenses.
Market for CD-SAXS and metrology solutions estimated >$1B in five years per TechInsights.

Key facts

Extracted from this filing and checked against the source text.

Material Agreements SEC 8-K Item 1.01/1.02 confidence 0.9

ONTO INNOVATION INC. entered into Share Purchase Agreement with Atom Investments, L.P. valued at approximately $710 million (effective 2026-04-21).

Action: entry
Agreement: asset purchase
Counterparty: Atom Investments, L.P.
Value: approximately $710 million
Effective: 2026-04-21

Exact text from the filing

On April 21, 2026 (Tokyo time), Onto Innovation Inc. (the “Company”) entered into a Share Purchase Agreement (the “Purchase Agreement”), with Atom Investments, L.P. (the “Seller”), an affiliate of The Carlyle Group, pursuant to which the Company agreed to acquire 61,123,436 shares (27% of the issued and outstanding shares) of the common stock of Rigaku Holdings Corporation (“Rigaku”), from the Seller for an aggregate purchase price of approximately $710 million

View on SEC.gov

281 material agreements filed in the last 30 days. Browse all material agreements →

ONTO INNOVATION INC. filing history →

Source: SEC EDGAR

accession 0001193125-26-164529

view filing index on sec.gov

view primary document

Machine-readable: JSON · Markdown · Plain text

This headline and bullets were generated automatically by deepseek-v4-flash:cloud@v2 from the public filing. Read the source on SEC.gov before relying on any specific claim. Not investment advice. See methodology for how this pipeline works.