Onto Innovation to acquire 27% stake in Rigaku for $710M; strategic partnership deepened

ONTO INNOVATION INC.

Purchase price ~$710M for 61.1M shares (27% of Rigaku) from Carlyle affiliate; expected close H2 2026.
Acquisition to accelerate joint X-ray/OCD process control solutions; already selected by two key customers.
Investment expected to be accretive as of Dec 31, 2026; Onto gets one board seat.
$500M bridge loan commitment from Goldman Sachs to help finance the deal and related expenses.
Market for CD-SAXS and metrology solutions estimated >$1B in five years per TechInsights.

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