---
schema_version: "secwatch.filing_event.v1"
accession: "0001193125-26-206365"
form_type: "8-K"
ticker: "ONTO"
cik: "0000704532"
company_name: "ONTO INNOVATION INC."
filed_at: "2026-05-05T23:59:59+00:00"
generated_at: "2026-05-14T23:37:57.975236+00:00"
event_type: "earnings"
sentiment: "positive"
materiality_score: 0.9
calibrated_materiality_score: 0.9
confidence: "high"
source: SEC EDGAR
---

# Onto Innovation posts record Q1 revenue of $292M; to acquire 27% of Rigaku for ~$710M

## Summary
- Record quarterly revenue of $292M, up nearly 10% sequentially from Q4 2025.
- Dragonfly G5 qualified at a leading 2.5D logic customer and a high-bandwidth memory customer.
- Atlas G6 selected by second logic customer for gate-all-around metrology; advanced nodes grew 13% in Q1.
- Strategic collaboration with Rigaku: Onto to purchase 27% stake for ~$710M, expected close H2 2026; right to nominate one director.

## SEC filing metadata
- accession: 0001193125-26-206365
- form_type: 8-K
- ticker: ONTO
- cik: 0000704532
- company_name: ONTO INNOVATION INC.
- filed_at: 2026-05-05T23:59:59+00:00
- event_type: earnings
- sentiment: positive
- materiality_score: 0.9
- calibrated_materiality_score: 0.9
- confidence: high
- sec_items: 2.02, 9.01
- EDGAR index: https://www.sec.gov/Archives/edgar/data/704532/000119312526206365/0001193125-26-206365-index.htm
- EDGAR primary document: https://www.sec.gov/Archives/edgar/data/704532/000119312526206365/onto-20260505.htm

## Machine-readable alternates
- HTML: https://secwatch.observer/filing/0001193125-26-206365
- JSON: https://secwatch.observer/filing/0001193125-26-206365.json
- Plain text: https://secwatch.observer/filing/0001193125-26-206365.txt

## Key facts
- Earnings Releases
  ONTO INNOVATION INC. reported first quarter of 2026 results: revenue Record quarterly revenue of $292 million.
  - Period: first quarter of 2026
  - Revenue: Record quarterly revenue of $292 million
  - Result: reported results
  source text: “Onto,” or the “Company”) today announced financial results for the first quarter of 2026. First Quarter Business and Financial Highlights: • Record quarterly revenue of $292 million, representing nearly 10% sequential growth from the fourth quarter of 2025. • Dragonfly ® G5 system qualified at a leading 2.5D logic customer and a high-bandwidth memory
  evidence_url: https://www.sec.gov/Archives/edgar/data/704532/000119312526206365/0001193125-26-206365-index.htm

This AI-assisted summary is a reading aid. Review the linked SEC EDGAR filing before relying on any specific claim.