Onto Innovation closes $720M purchase of 27% stake in Rigaku Holdings

ONTO INNOVATION INC.

Completed purchase of 61,123,436 Rigaku shares (27% of outstanding) from Atom Investment, a Carlyle affiliate, for ~$720M (¥113.08B).
Investment deepens strategic collaboration on X-ray process control for semiconductor manufacturing; first announced April 2026.
Onto will account for investment under fair value option, not consolidate Rigaku; will nominate a director to Rigaku's board.
CEO Mike Plisinski says investment accelerates innovation and enhances holistic process control solutions for next-gen chips.

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