---
schema_version: "secwatch.filing_event.v1"
accession: "0001564590-21-050162"
form_type: "8-K"
ticker: "ONTO"
cik: "0000704532"
company_name: "ONTO INNOVATION INC."
filed_at: "2021-10-05T23:59:59+00:00"
generated_at: "2026-06-28T23:11:09.296231+00:00"
event_type: "leadership"
sentiment: "neutral"
materiality_score: 0.5
calibrated_materiality_score: 0.5
confidence: "high"
source: SEC EDGAR
---

# Onto Innovation appoints COO James Harlow; GC Robert Koch plans 2022 retirement

## Summary
- James Harlow named COO effective Oct 1, 2021; joins from Applied Materials where he served as Managing Director.
- Harlow receives $300k base salary, 60% bonus target, $300k RSU grant vesting over 3 years, and $200k signing bonus.
- Robert Koch, VP & General Counsel, notified company of intent to retire in 2022; will stay until successor is appointed.

## SEC filing metadata
- accession: 0001564590-21-050162
- form_type: 8-K
- ticker: ONTO
- cik: 0000704532
- company_name: ONTO INNOVATION INC.
- filed_at: 2021-10-05T23:59:59+00:00
- event_type: leadership
- sentiment: neutral
- materiality_score: 0.5
- calibrated_materiality_score: 0.5
- confidence: high
- sec_items: 5.02
- EDGAR index: https://www.sec.gov/Archives/edgar/data/704532/000156459021050162/0001564590-21-050162-index.htm
- EDGAR primary document: https://www.sec.gov/Archives/edgar/data/704532/000156459021050162/onto-8k_20211001.htm

## Machine-readable alternates
- HTML: https://secwatch.observer/filing/0001564590-21-050162
- JSON: https://secwatch.observer/filing/0001564590-21-050162.json
- Plain text: https://secwatch.observer/filing/0001564590-21-050162.txt

## Key facts
- Executive change
  James Harlow was appointed as Chief Operating Officer at ONTO INNOVATION INC..
  - Action: appointed
  - Role: Chief Operating Officer
  source text: The Board of Directors of Onto Innovation Inc. (the “Company”) has appointed James Harlow (“Mr. Harlow”) as the Company’s Chief Operating Officer effective on October 1, 2021
  evidence_url: https://www.sec.gov/Archives/edgar/data/704532/000156459021050162/0001564590-21-050162-index.htm
- Executive change
  Robert A. Koch departed as Vice President and General Counsel at ONTO INNOVATION INC..
  - Action: intends to retire
  - Role: Vice President and General Counsel
  source text: On October 1, 2021, Robert A. Koch, the Company’s Vice President and General Counsel, notified the Company that he intends to retire sometime in 2022.
  evidence_url: https://www.sec.gov/Archives/edgar/data/704532/000156459021050162/0001564590-21-050162-index.htm

This AI-assisted summary is a reading aid. Review the linked SEC EDGAR filing before relying on any specific claim.