---
schema_version: "secwatch.filing_event.v1"
accession: "0001564590-21-054486"
form_type: "8-K"
ticker: "ONTO"
cik: "0000704532"
company_name: "ONTO INNOVATION INC."
filed_at: "2021-11-04T23:59:59+00:00"
generated_at: "2026-06-28T13:25:47.031200+00:00"
event_type: "earnings"
sentiment: "positive"
materiality_score: 0.75
calibrated_materiality_score: 0.75
confidence: "high"
source: SEC EDGAR
---

# Onto Innovation Q3 revenue $200.6M (+59% YoY); guides Q4 above Q3

## Summary
- Revenue $200.6M, 59% YoY growth, above guidance; GAAP EPS $0.73, non-GAAP EPS $0.98.
- Q4 guidance: revenue $210-220M, GAAP EPS $0.75-0.89, non-GAAP EPS $1.02-1.16.
- Operating margin 21% GAAP, 29% non-GAAP; gross margin 55% (up 100 bps YoY).
- Record backlog more than double year ago; cash $461.6M, up $50.7M QoQ.
- Metrology revenue from advanced logic up 95% QoQ; inspection up 21%, software up 28%.

## SEC filing metadata
- accession: 0001564590-21-054486
- form_type: 8-K
- ticker: ONTO
- cik: 0000704532
- company_name: ONTO INNOVATION INC.
- filed_at: 2021-11-04T23:59:59+00:00
- event_type: earnings
- sentiment: positive
- materiality_score: 0.75
- calibrated_materiality_score: 0.75
- confidence: high
- sec_items: 2.02, 9.01
- EDGAR index: https://www.sec.gov/Archives/edgar/data/704532/000156459021054486/0001564590-21-054486-index.htm
- EDGAR primary document: https://www.sec.gov/Archives/edgar/data/704532/000156459021054486/onto-8k_20211104.htm

## Machine-readable alternates
- HTML: https://secwatch.observer/filing/0001564590-21-054486
- JSON: https://secwatch.observer/filing/0001564590-21-054486.json
- Plain text: https://secwatch.observer/filing/0001564590-21-054486.txt

This AI-assisted summary is a reading aid. Review the linked SEC EDGAR filing before relying on any specific claim.