Amtech Systems shareholders elect directors, ratify auditor, approve say-on-pay at 2023 annual meeting

Proposal 3 – Advisory vote on named executive officer compensation The shareholders approved, on an advisory basis, the compensation of the named executive officers. For Against Abstain Broker Non-Votes 8,369,822 319,268 560,791 2,086,875

Proposal 2 – To approve the ratification of the independent registered public accountants The shareholders ratified the appointment of Grant Thornton LLP as the Company’s independent registered public accounting firm for fiscal year 2023. For Against Abstain Broker Non-Votes 11,254,293 43,753 38,710 0

Proposal 1 – Election of directors The individuals listed below received the highest number of affirmative votes of the outstanding shares of the Company’s common stock present or represented by proxy and voting at the Annual Meeting and were elected at the Annual Meeting to serve a one-year term on the Company’s board of directors. For Withheld Broker Non-Votes Michael Whang 9,202,662 47,219 2,086,875 Lisa D. Gibbs 8,496,599 753,282 2,086,875 Robert M. Averick 9,073,311 176,570 2,086,875 Robert C. Daigle 9,063,316 186,565 2,086,875 Michael Garnreiter 8,857,923 391,958 2,086,875 Michael M. Ludwig 9,206,148 43,733 2,086,875