Onto Innovation posts record Q1 revenue of $292M; to acquire 27% of Rigaku for ~$710M

ONTO INNOVATION INC.

2026-Q1 EPS reported $0.67 revenue$291,949,000

Record quarterly revenue of $292M, up nearly 10% sequentially from Q4 2025.
Dragonfly G5 qualified at a leading 2.5D logic customer and a high-bandwidth memory customer.
Atlas G6 selected by second logic customer for gate-all-around metrology; advanced nodes grew 13% in Q1.
Strategic collaboration with Rigaku: Onto to purchase 27% stake for ~$710M, expected close H2 2026; right to nominate one director.

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