Onto Innovation posts record Q1 revenue of $292M; to acquire 27% of Rigaku for ~$710M

ONTO INNOVATION INC.

2026-Q1 EPS reported $0.67 revenue$291,949,000

Record quarterly revenue of $292M, up nearly 10% sequentially from Q4 2025.
Dragonfly G5 qualified at a leading 2.5D logic customer and a high-bandwidth memory customer.
Atlas G6 selected by second logic customer for gate-all-around metrology; advanced nodes grew 13% in Q1.
Strategic collaboration with Rigaku: Onto to purchase 27% stake for ~$710M, expected close H2 2026; right to nominate one director.

item 2.02 item 9.01

Key facts

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Earnings Releases SEC 8-K Item 2.02 confidence 0.9

ONTO INNOVATION INC. reported first quarter of 2026 results: revenue Record quarterly revenue of $292 million.

Period: first quarter of 2026
Revenue: Record quarterly revenue of $292 million
Result: reported results

Exact text from the filing

“Onto,” or the “Company”) today announced financial results for the first quarter of 2026. First Quarter Business and Financial Highlights: • Record quarterly revenue of $292 million, representing nearly 10% sequential growth from the fourth quarter of 2025. • Dragonfly ® G5 system qualified at a leading 2.5D logic customer and a high-bandwidth memory

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ONTO INNOVATION INC. filing history →

Source: SEC EDGAR

accession 0001193125-26-206365

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