Onto Innovation stockholders re-elect all directors, approve say-on-pay, ratify EY auditor at 2026 annual meeting

The stockholders ratified Ernst & Young LLP as the Company’s independent registered public accounting firm for the fiscal year ending December 31, 2026, by the following vote: For Against Abstain Broker Non-Votes 44,378,549 178,157 147,375 0

The stockholders elected Stephen D. Kelley, Susan D. Lynch, David B. Miller, Michael P. Plisinski, Stephen S. Schwartz, Christopher A. Seams, and May Su as directors of the Company, each to serve until the next annual meeting. The voting for each director was as follows: Nominee For Against Abstain Broker Non-Votes Stephen D. Kelley 41,519,539 447,694 54,464 2,682,384 Susan D. Lynch 41,705,037 262,190 54,470 2,682,384 David B. Miller 38,775,556 3,185,107 61,034 2,682,384 Michael P. Plisinski 41,724,970 280,583 16,144 2,682,384 Stephen S. Schwartz 41,523,952 444,091 53,654 2,682,384 Christopher A. Seams 40,522,014 1,479,450 20,233 2,682,384 May Su 41,056,051 904,119 61,527 2,682,384

The stockholders approved, on an advisory (non-binding) basis, the compensation for the Company’s named executive officers, as disclosed in the Company’s proxy statement for the 2025 Annual Meeting, by the following vote: For Against Abstain Broker Non-Votes 40,624,022 1,196,481 201,194 2,682,384